Processing outcomes of the AFM probe-based machining approach with different feed directions
نویسندگان
چکیده
منابع مشابه
Processing outcomes of the AFM probe-based machining approach with different feed directions
We present experimental and theoretical results to describe and explain processing outcomes when producing nanochannels that are a few times wider than the atomic force microscope (AFM) probe using an AFM. This is achieved when AFM tip-based machining is performed with reciprocating motion of the tip of the AFM probe. In this case, different feed directions with respect to the orientation of th...
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The controlled removal of material conducted with the tip of an atomic force microscope (AFM) probe is a technique that has started gaining increased attention in recent years within the micro and nano manufacturing research community. The attractive characteristics of this process are that it is relatively simple to implement and low-cost compared with vacuum-based lithography techniques for m...
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The resonant frequency and sensitivity of an atomic force microscope (AFM) cantilever with assembled cantilever probe (ACP) have been analyzed and a closed-form expression for the sensitivity of vibration modes has been obtained. The proposed ACP comprises an inclined cantilever and extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidew...
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متن کاملStudy of the flexural sensitivity and resonant frequency of an inclined AFM cantilever with sidewall probe
The resonant frequency and sensitivity of an atomic force microscope (AFM) cantilever with assembled cantilever probe (ACP) have been analyzed and a closed-form expression for the sensitivity of vibration modes has been obtained. The proposed ACP comprises an inclined cantilever and extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidew...
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 2016
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2016.05.009